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Shanghai Zhengxi Instrument Equipment Co., Ltd
Home>Products>ZXGP-800 series large platform silicon wafer inspection microscope
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ZXGP-800 series large platform silicon wafer inspection microscope
Purpose of the instrument: ZXGP-800 research grade large platform silicon wafer microscope is mainly used for observing semiconductor silicon wafers
Product details

The purpose of the instrument:

The ZXGP-800 research grade large platform silicon wafer microscope is mainly used for observing semiconductor silicon wafers. It can produce high-definition images with strong stereoscopic effect, clear and wide imaging, long working distance, and a large field of view and corresponding magnification. Equipped with a high pixel digital camera, it can clearly see the micro morphology distribution of the "pyramid" of silicon wafers and provide defect analysis services for silicon wafers It is a commonly used microscope for solar cell silicon wafers and has a wide range of applications in the semiconductor industry.

The large platform silicon wafer inspection microscope can observe dislocations, scratches, and edge breaks that are difficult to observe with the naked eye on solar cell silicon wafers; It can also analyze the impurities and residual components of silicon wafers Impurities include particles, organic impurities, inorganic impurities, metal ions, silicon powder dust, etc., which can cause discoloration, bluing, blackening and other phenomena in the silicon wafer after grinding, making the grinding wafer unqualified. It is a common instrument for quality control in solar cell silicon wafer production enterprises.

2、 System Introduction

The large platform silicon wafer microscope system organically combines traditional optical instruments with computers (digital cameras) through photoelectric converters. It can observe real-time dynamic images on the computer (digital camera) display screen and edit, save, and print the required images.

3、 Technical parameters

1. Eyepiece

Type

magnification

Field of view (mm)

Large field eyepiece

10X

Φ22

2. Objective lens

Type

magnification

Numerical aperture (NA)

Working distance (mm)

Infinite flat field achromatic objective lens (bright/dark field objective lens)

4X

0.1

17.80

10X

0.25

10.00

20X

0.40

5.10

40X

0.60

2.90

3. Optical magnification: 40X-400X (optional lens can reach 1000X)

4. Three eyes: 30˚Tilt, full light photography

5. Converter: Four hole inward facing ball with internal positioning

6. Stage: Three layer mechanical mobile size:300mm×268mmMobile range250mm×200mm

7. Focusing mechanism: Coarse micro coaxial focusing, with locking and limiting devices, micro grid value: 0.7 μ m

8. Fallen lighting system: 6V 20W halogen lamp, adjustable brightness and lamp position,

Built in field of view light barrier, aperture light barrier, push-pull analyzer and polarizer,

9. Color filter: yellow, blue, green, frosted glass color filter conversion device

10. Unique anti mold system

4、 System composition

ZXGP-800 type: 1. Silicon wafer microscope 2. Adaptor lens 3. Camera (CCD) 4. Image acquisition card 5. Software

5、 Optional parts

1. Eyepiece: 10X (division) 2. Objective: 50X 60X 100X (dry)

3. Imaging system 4. Professional software

5. Supporting computer



1. Eyepiece

Type

magnification

Field of view (mm)

Large field eyepiece

10X

Φ22

2. Objective lens

Type

magnification

Numerical aperture (NA)

Working distance (mm)

Infinite flat field achromatic objective lens (bright/dark field objective lens)

5X

0.12

8.05

10X

0.25

7.86

20X

0.40

7.23

50X

0.70

1.75

80X

0.80

0.80

3. Optical magnification: 50X-800X

4. Triple head: tilted at 30 degrees, capable of 100% light transmission for photography

5. Converter: Five hole inward facing ball with internal positioning

6. Stage: Three layer mechanical mobile size: 280mmX270mm, moving range: 204mmX204mm

7. Focusing mechanism: Coarse micro coaxial focusing, with locking and limiting devices, micro grid value: 0.7 μ m

8. Fallen lighting system: 15V 50W halogen lamp, adjustable brightness and lamp position,

Built in field of view light barrier, aperture light barrier, push-pull analyzer and polarizer,

9. Color filter: yellow, blue, green, frosted glass color filter conversion device

10. Unique anti mold system

4、 System composition

ZXGP-800 type: 1. Silicon wafer microscope 2. Adaptor lens 3. Camera (CCD) 4. Image acquisition card 5. Software

5、 Optional parts

1. Eyepiece: 10X (divided)

2. Objective lens: 40X 60X 100X (dry)



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