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YAMATO photoresist curing oven DTPN-612GCT01
Performance (according to JTM specifications) Temperature range: Room temperature+50-500 ℃ Temperature adjustment accuracy: ± 0.5 ℃ (at 450 ℃ under no
Product details
Performance (according to JTM specifications)
Temperature range for use: room temperature+50-500 ℃
Temperature regulation accuracy: ± 0 5 ℃ (at 45 ℃ and 0 ℃ without load)
Temperature distribution accuracy: ± 5 ℃ (at 45 ℃ without load)
According to the JTM standard, 9 points are measured at 1/6 of the effective size, including the center point inside the slot
Running: Program running (heating, constant temperature, cooling, timed)
Timer function: 1 minute to 99 hours, 59 minutes, 100 to 999 hours,
Heating rate: ≤ 40min, (150-450 ℃ ≥ 7.5 ℃/min, average throughout the entire process)
Cleanliness: Level 100 at constant temperature
Oxygen concentration: below 20 ppm
Vacuum degree: below 100Pa
Vacuum arrival time: about 15 minutes
Working status indicator: There is a working process on the touch screen (vacuum pumping - N2 replacement - oxygen concentration detection - heating, N2 maintenance - constant - cooling - vacuum pumping - air entering - end)
Construction
Exterior material: Cold drawn color steel plate, surface sprayed with plastic
Material of internal pressure bearing body: SUS 316 stainless steel plate,
Thermal insulation material: aluminum silicate cotton board
Heater: Armored stainless steel heating tube 380V4.0KwX3=12KW
Heating plate 220V 300 w X 14=4.2Kw
Combination type air supply fan: centrifugal fan blades with a diameter of 230 X 130-1, air volume L=1800m3/h
Variable frequency speed regulation motor 380V (1450/min rotation)
N2 nozzle: N2 nozzle
Water cooler: SUS coil heat exchanger
Filter: High temperature resistant HEPA filter (filter rate of 0.3 μ m particles above 99.9995%)
Door: Single door in front, door opening W660 × H660
Dimensions: Body W1150 × D1215 × H1697 (excluding settings and protrusions)
Interior dimensions: W600 × D600 × H600mm
Capacity: 216 L
Number of shed sections: 17 sections/30mm (evenly distributed in height direction)
Number of shed boards: 2 pieces
N2 external intake connector: quick change connector with a diameter of 10mm each.
Cooling water joint: one quick change joint with a diameter of 10mm and one with a diameter of 16mm.
Test hole: 1 KF16 temperature distribution precision test port on the left side, 2 1/4 internal thread joints, used for detecting oxygen concentration and cleanliness.
Electromagnetic valve: controls the on/off timing of vacuum, N2, and water.
Weight: 320g
Power supply: AC380V 3 φ 5W 50Hz below 30A
Calculation and installation
Temperature regulator: LCD touch screen with PLC, PID control, LCD display, touch button settings.
Temperature sensors: 4 K-type thermocouples
Pressure controller: digital
Pressure transmitter: relative value pressure transmitter
Differential pressure gauge: used to measure the pressure difference between the inner tank and the air conditioner as a basis to determine whether the filter needs to be cleaned.
Inverter: Used to adjust the fan speed (set the fan frequency through the touch screen)
Glass rotor flowmeter: a. 300L/min is used for fast and ensuring that the oxygen concentration in the tank is below 10ppm.
b. 15-25L/min is used to maintain the oxygen concentration in the tank below 10ppm, and a preheater is added to ensure that the N2 temperature entering the tank is at the set temperature inside the tank, without interfering with the uniformity inside the tank.
Oxygen concentration analyzer: detects the oxygen concentration in the tank, below 20ppm when heated,
Vacuum pump: AiFaKe two-stage oil rotary vane vacuum pump
Temperature Overrise Prevention Device: Used to prevent abnormal temperature rise,
Electromagnetic valve: used to control the opening and closing of vacuum, N2, and cooling water.
Mandatory door locking: 2 locations
Protector
Leakage protection switch: Body 380V leakage protection switch
Leakage, short circuit, overcurrent protection
Rated sensitivity current 30mA
Overheating prevention circuit: When the temperature rises abnormally, the heater power supply is disconnected, the motor fan blades are activated, and an alarm is triggered
Fan motor: When the motor is overloaded, the protection circuit of the heater power supply is disconnected and an alarm is triggered
N2 abnormality: Insufficient nitrogen flow, heating stopped, and alarm triggered
Abnormal cooling water: insufficient flow, alarm
Door lock: The door automatically locks during operation
Door switch: If the door is not closed properly, the machine will not start. Press the start button to sound an alarm.
Abnormal display: When the above abnormalities occur, the alarm prompt box on the touch screen displays the fault content abnormally, and the buzzer sounds.
Temperature range for use: room temperature+50-500 ℃
Temperature regulation accuracy: ± 0 5 ℃ (at 45 ℃ and 0 ℃ without load)
Temperature distribution accuracy: ± 5 ℃ (at 45 ℃ without load)
According to the JTM standard, 9 points are measured at 1/6 of the effective size, including the center point inside the slot
Running: Program running (heating, constant temperature, cooling, timed)
Timer function: 1 minute to 99 hours, 59 minutes, 100 to 999 hours,
Heating rate: ≤ 40min, (150-450 ℃ ≥ 7.5 ℃/min, average throughout the entire process)
Cleanliness: Level 100 at constant temperature
Oxygen concentration: below 20 ppm
Vacuum degree: below 100Pa
Vacuum arrival time: about 15 minutes
Working status indicator: There is a working process on the touch screen (vacuum pumping - N2 replacement - oxygen concentration detection - heating, N2 maintenance - constant - cooling - vacuum pumping - air entering - end)
Construction
Exterior material: Cold drawn color steel plate, surface sprayed with plastic
Material of internal pressure bearing body: SUS 316 stainless steel plate,
Thermal insulation material: aluminum silicate cotton board
Heater: Armored stainless steel heating tube 380V4.0KwX3=12KW
Heating plate 220V 300 w X 14=4.2Kw
Combination type air supply fan: centrifugal fan blades with a diameter of 230 X 130-1, air volume L=1800m3/h
Variable frequency speed regulation motor 380V (1450/min rotation)
N2 nozzle: N2 nozzle
Water cooler: SUS coil heat exchanger
Filter: High temperature resistant HEPA filter (filter rate of 0.3 μ m particles above 99.9995%)
Door: Single door in front, door opening W660 × H660
Dimensions: Body W1150 × D1215 × H1697 (excluding settings and protrusions)
Interior dimensions: W600 × D600 × H600mm
Capacity: 216 L
Number of shed sections: 17 sections/30mm (evenly distributed in height direction)
Number of shed boards: 2 pieces
N2 external intake connector: quick change connector with a diameter of 10mm each.
Cooling water joint: one quick change joint with a diameter of 10mm and one with a diameter of 16mm.
Test hole: 1 KF16 temperature distribution precision test port on the left side, 2 1/4 internal thread joints, used for detecting oxygen concentration and cleanliness.
Electromagnetic valve: controls the on/off timing of vacuum, N2, and water.
Weight: 320g
Power supply: AC380V 3 φ 5W 50Hz below 30A
Calculation and installation
Temperature regulator: LCD touch screen with PLC, PID control, LCD display, touch button settings.
Temperature sensors: 4 K-type thermocouples
Pressure controller: digital
Pressure transmitter: relative value pressure transmitter
Differential pressure gauge: used to measure the pressure difference between the inner tank and the air conditioner as a basis to determine whether the filter needs to be cleaned.
Inverter: Used to adjust the fan speed (set the fan frequency through the touch screen)
Glass rotor flowmeter: a. 300L/min is used for fast and ensuring that the oxygen concentration in the tank is below 10ppm.
b. 15-25L/min is used to maintain the oxygen concentration in the tank below 10ppm, and a preheater is added to ensure that the N2 temperature entering the tank is at the set temperature inside the tank, without interfering with the uniformity inside the tank.
Oxygen concentration analyzer: detects the oxygen concentration in the tank, below 20ppm when heated,
Vacuum pump: AiFaKe two-stage oil rotary vane vacuum pump
Temperature Overrise Prevention Device: Used to prevent abnormal temperature rise,
Electromagnetic valve: used to control the opening and closing of vacuum, N2, and cooling water.
Mandatory door locking: 2 locations
Protector
Leakage protection switch: Body 380V leakage protection switch
Leakage, short circuit, overcurrent protection
Rated sensitivity current 30mA
Overheating prevention circuit: When the temperature rises abnormally, the heater power supply is disconnected, the motor fan blades are activated, and an alarm is triggered
Fan motor: When the motor is overloaded, the protection circuit of the heater power supply is disconnected and an alarm is triggered
N2 abnormality: Insufficient nitrogen flow, heating stopped, and alarm triggered
Abnormal cooling water: insufficient flow, alarm
Door lock: The door automatically locks during operation
Door switch: If the door is not closed properly, the machine will not start. Press the start button to sound an alarm.
Abnormal display: When the above abnormalities occur, the alarm prompt box on the touch screen displays the fault content abnormally, and the buzzer sounds.
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