Evaluation parameters

Evaluation parameters

Ra、Rz、(Rmax、Ry)、Rt、Rp、Rpm、Rz(jis)、Rv、R3z、Rs m、Rsk、Rk、Rc、Rpk、Rvk、Mr1、Mr2

measuring range

Zaxle

800μm

Xaxle

50mm

Straightness accuracy

Straightness accuracy

0.4μm

Resolution（ZAxis)

Resolution（ZAxis)

0.001μm

Number of samples/Resolution

Number of samples/Resolution

9600drop/16bit

filter

filter

Gaussian(Gaussian)Filter（ISO11562:1996），2RCfilter

Sampling length

Sampling length

λc╳3、4、5、6、7（1.0-17.5mm）

Cutoff wavelength

Cutoff wavelength

0.25,0.8,2.5

measurement speed

measurement speed

0.1mm/s，0.32mm/s，0.5mm/s

return speed

return speed

(Automatic)1mm/s

Indication error

Indication error

±5%

Indication stability

Indication stability

3%

Measurement repeatability

Measurement repeatability

3%

Magnification of graphics

Magnification of graphics

10-500000Automatic adjustment

sensor

sensor

needle tipR=2μmDiamond (measuring power)1mN）

R=5μmdiamond(Measuring force4mN）