Product parameters:
| model | Vacuum plasma cleaning machineTS-PL200MA |
| RF power supply |
13.56MHz |
|
Power Matching Device |
0~1000W adjustable |
|
plc automatic control system |
Mitsubishi, Japan |
|
Variable frequency control system |
Taiwan Delta, PID closed-loop control, vacuum degree can be maintained |
|
Human computer industrial control system |
Taiwan Weilun, 7-inch |
|
vacuum pump |
flyby |
|
Vacuum exhaust system |
Beiyi, all stainless steel pipeline+corrugated pipe+two-stage filtration device |
|
Vacuum gas supply system |
SMC, Φ 6 all stainless steel pipe+stainless steel lock sleeve pipeline |
|
Variable frequency control system |
Delta PID closed-loop control |
|
Vacuum breaking system |
Beiyi |
|
Working vacuum |
10~60pa (can be set according to requirements, can maintain a constant vacuum degree) |
|
Equipment weight (including host/vacuum pump) |
500KG |
|
Compressed air requirements |
0.6~0.8MPa |
| process gases | O2、 N2、 Ar2、 CF4 |
Performance advantages of Dongxin High tech vacuum plasma cleaning machine:
1. Suitable for complex shaped samples, including inner walls of holes, for uniform cleaning in all directions.
2. The entire process is pollution-free.
3. Imported precision CNC machining technology and quality monitoring through imported coordinate measuring instruments.
4. Excellent sealing vacuum chamber design, military grade high vacuum chamber design and manufacturing process.
5. The original imported power circuit technology generates high-density plasma, ensuring outstanding cleaning effect.
6. A discharge device with special treatment and special structure ensures the formation of stable and uniform plasma.
7. Adopting high-precision electronic flow meters, Sevelock gas pipelines and valves from the United States.
8. The independently developed low-pressure vacuum plasma cleaning software system has stable and reliable performance, simple operation, easy maintenance, and high efficiency and convenience.
9. Powerful and comprehensive safety protection system, temperature safety protection function, overload protection function, short circuit and open circuit alarm protection function, and various misoperation protection functions.
Principle of vacuum plasma cleaning machine:
1.1 plasmareaction mechanism
Plasma is an ionized gas with roughly equal densities of positive ions and electrons. Composed of ions, electrons, free radicals, photons, and neutral particles, it is the fourth state of matter. In addition to gas molecules, ions, and electrons, there are also atoms or atomic groups (also known as free radicals) that are electrically neutral when excited by energy, as well as the light emitted by the plasma. The length of the wave and the level of energy play important roles in the interaction between the plasma and the surface of the object.
1.2 Plasma surface treatment mechanism:
(A) Etching effect on the surface of materials
The large number of ions, excited state molecules, free radicals, and other active particles in the physical action plasma act on the surface of solid samples, removing the original pollutants and impurities on the surface, and generating etching effect, making the sample surface rough and forming many fine pits, increasing the specific surface area of the sample. Improve the wetting performance of solid surfaces.
(B) Activation bond energy, cross-linking effect
The particle energy in plasma is between 0-20eV, while most of the bond energies in polymers are between 0-10eV. Therefore, when plasma acts on a solid surface, it can break the original chemical bonds on the surface. These bonds in the free radicals in the plasma form a network like cross-linked structure, greatly activating surface activity.
(C) Forming new functional groups
If reactive gases are introduced into the discharge gas, complex chemical reactions will occur on the surface of the activated material, introducing new functional groups such as alkyl, amino, carboxyl, etc. These functional groups are all active and can significantly improve the surface activity of the material.
1.3 Working principle of vacuum plasma cleaning machine
The equipment mainly consists of a vacuum chamber, a high-frequency plasma power supply, a vacuum pumping system, an inflation system, an automatic control system, and other parts. The basic working principle is to use a vacuum pump to evacuate the working chamber to a vacuum degree of 0.15-0.3mbar in a vacuum state, and then ionize the gas under the action of a high-frequency generator to form plasma (the fourth state of matter), and then use the plasma to treat the surface of the workpiece. The prominent feature of plasma state is high uniformity glow discharge, which emits visible light ranging from blue to deep purple according to different gases, and the material processing temperature is close to room temperature. These highly active particles interact with the treated surface, resulting in various surface modifications such as hydrophilicity, water repellency, low friction, high cleanliness, activation, etching, etc.
Scope of use of vacuum plasma cleaning machine:
1. Plasma surface activation/cleaning; 2. Bonding after plasma treatment;3. Plasma etching/activation; 4. Plasma debonding; 5. Plasma coating (hydrophilic, hydrophobic); 6. Enhance the nationality; 7. Plasma coating; 8. In situations such as plasma ashing and surface modification.
Through its processing, the wetting ability of the material surface can be improved, enabling various materials to undergo coating, plating, and other operations, enhancing adhesion and bonding strength, while removing organic pollutants, oil stains, or grease.
after-sale service:
Rapid response, with after-sales service teams in Shenzhen, Suzhou, Chengdu, Changsha, Zhengzhou and other places.The supplier strictly adheres to the current national standards and technical specifications to ensure product performance and quality
The entire vacuum plasma cleaning machine comes with a one-year warranty. If the equipment malfunctions during the warranty period (not caused by human factors), Party B shall arrange after-sales personnel to follow up and handle it until the fault is eliminated (excluding non working hours and working days). After the warranty period, the supplier shall provide free technical consultation and maintenance fees, and only charge relevant cost fees.
