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Shanghai Zhengxi Instrument Equipment Co., Ltd
Home>Products>Research Silicon Wafer Inspection Microscope ZXGP-500 Series
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Research Silicon Wafer Inspection Microscope ZXGP-500 Series
1、 The ZXGP-500 series bright dark field silicon wafer inspection microscope is suitable for microscopic observation of solar cell silicon wafers
Product details

1、 Purpose:


The ZXGP-500 series bright dark field silicon wafer inspection microscope is suitable for microscopic observation of solar cell silicon wafers. This instrument is equipped with a large moving range stage, a falling beam illumination device, a long working distance flat field achromatic objective lens, a large field eyepiece, clear images, good contrast, and is also equipped with a polarizing device and a high pixel digital camera This instrument is equipped with a dark field objective lens, which makes the image clearer when observing silicon wafers. It is an ideal instrument for detecting the microstructure distribution of the "pyramid" of solar cell silicon wafers and analyzing defects in silicon wafers


The silicon wafer inspection microscope can observe dislocations, scratches, and broken edges that are difficult to observe with the naked eye; It can also analyze the impurities and residual components of silicon wafers Impurities include particles, organic impurities, inorganic impurities, metal ions, silicon powder dust, etc., which can cause discoloration, bluing, blackening and other phenomena in the silicon wafer after grinding, resulting in unqualified grinding It is one of the commonly used detection instruments in the production process of solar cell silicon wafers.

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technical standard


Standard Configuration

Large field of view WF10X (field of view size Φ 22mm)

Infinite long working distance flat field achromatic objective lens


PL L10X/0.25 working distance: 20.2 mm




PL L60X/0.70 working distance: 3.18 mm




Eyepiece tube




focusing system




converter




Carrier platform




Falling light illumination system




Configure yellow, blue, green color filters and frosted glass sheets



Transmissive lighting system



Built in field of view light bar in the light collecting mirror



6V30W halogen lamp, adjustable brightness

Anti mold system

Computer type (ZXGP-500C)

Digital Type (ZXGP-500E)



Optional accessories



eyepiece




objective lens




CCD connector




Camera equipment




Digital camera connector




analysis software

Two dimensional image measurement and analysis software




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