Phenom ProX is the fifth generationElectron microscope energy spectrum integrated machineIt is an integrated imaging analysis system with a resolution increase of 20%, further expanding its application range and making it more suitable for samples sensitive to electron beams. With the help of this system, it is possible to observe the surface morphology of the sample and analyze its elemental composition. When studying samples, obtaining morphological information of the samples only solves half of the problem. Obtaining information on the elemental composition of the sample is often essential. With the help of fully integrated and specially designed energy spectrum detectors, FeinaElectron microscope energy spectrum integrated machinePhenom ProX can comprehensively solve all the above-mentioned problems. An energy spectrometer is an analytical instrument that generates X-rays based on the excitation of a sample by an electron beam. Phenom's spectrometer is designed with integrated software and hardware in FeinaIn Phenom ProX system. Element Identification (EID) software enables users to perform multi-point analysis and detect the elemental components of samples. In addition, the software can also be extended to element analysis line mapping functionality. The step-by-step operation interface can help users collect and export analysis data more conveniently.