Product parameters of online chip vacuum plasma cleaning machine:
|
Power Supply System |
power |
F13.56MHz 0-600W (RF power supply) |
|
vacuum system |
vacuum line |
All stainless steel pipes and high-strength vacuum corrugated pipes |
|
material |
aluminum alloy |
|
|
tightness |
Integrated molding |
|
|
Volume of cavity |
6L |
|
|
Applicable product size |
180-280mmX25-90mm (length x width) |
|
|
Applicable box size |
180-290mm X25 * 93X250mm (length X width X height) |
|
|
Channel |
Standard 4 (customizable) |
|
|
Electrode plate size |
340x500mm |
|
|
Plasma excitation time |
Plasma excitation cleaning time |
5Sec |
|
production |
UPH |
480 (snake skin time 10 seconds, 4 channels) |
|
Cleaning ability |
Water droplet angle |
Drop angle test<12 ° |
|
Flow range |
0-300SCCM |
|
|
Process Gas |
Standard configuration includes 2 channels, customizable argon gas: 3bars 1L/min, nitrogen gas: 3bars 1L/min |
|
|
OTHERS |
power supply |
AC 380V 5.5KW |
|
External dimensions |
1600mmX1200x1600 |
Product features of online chip vacuum plasma:
1The track width can be adjusted, and four different widths of products can be cleaned simultaneously;
2Chip cleaning, the cleaning effect is more obvious;
3Single side loading and unloading structure, no need to replace the material box, the cleaned product automatically returns to the original material box, eliminating batch mixing;
4Double cleaning trays, one for cleaning and the other for material preparation, improve production efficiency;
5One click product replacement, all parameters and settings of the device are automatically loaded, without the need for manual settings;
6、Both manual and automatic cleaning are operated with one click, making it easier to operate and use;
7Multiple product safety designs ensure that there will be no deformation or damage to the product;
8Each of the four channels is independently tested to accurately determine the location of the problem;
9Multiple designs for equipment safety ensure personal safety;
10Modular design and international brand configuration ensure stable operation of the equipment.
Online chip vacuumPlasma cleaning machines have the advantages of low cost, easy use, low maintenance and upkeep costs, and environmental friendliness. They can be applied for surface treatment before chip bonding, wire bonding, and flip chip packaging processes. Compared with traditional standalone plasma cleaning machines, online chip cleaning machinesThe vacuum plasma cleaning machine has the advantages of high automation, high cleaning efficiency, high equipment cleanliness, and wide adaptability, and is suitable for large-scale fully automated production.
