VIP member
Helium ion chromatograph for analysis of dichlorosilane
The instrument is equipped with a highly sensitive helium ionization detector and adopts the central cutting technology of Huaai Company. The injectio
Product details
- product description
Dichlorosilane helium ion chromatographThe instrument is equipped with a highly sensitive helium ionization detector and adopts the central cutting technology of Huaai Company. The injection valves are all equipped with blow off protection gas paths; The whole machine adopts a multi column box design and is equipped with an automatic calibration system for injection pressure to ensure the injection volume of samples with different bottom gases. The product has successively won titles such as Shanghai High tech Achievement Transformation A-level Project, Shanghai Key New Product, Shanghai Torch Plan, and 2009 Scientific Instrument Product.
| project name | index | ||
| Trichlorosilane (SiHCl)3）Content (volume fraction)/l0-6 ≤ | 10 | ||
| Content of (Chlorosilane+Hydrogen Chloride) (SiH)3Cl+HCl content ", calculated as hydrogen chloride (volume fraction)/l0-6 ≤ | 50 | ||
| Nitrogen (N2）Content (volume fraction)/l0-6 ≤ | 1 | ||
| (Oxygen+Argon) (O2+Ar) content (volume fraction)/l0-6 ≤ | 1 | ||
| Carbon monoxide (CO) content (volume fraction)/l0-6 ≤ | 1 | ||
| Hydrogen (H)2）Content (volume fraction)/l0-6 ≤ | 10 | ||
| Carbon dioxide (CO)2）Content (volume fraction)/l0-6 ≤ | 1 | ||
| Total hydrocarbon (THC) content, expressed as methane (CH)4）Calculate (volume fraction)/l0-6 ≤ | 1 | ||
| Content of metal elements and other elements | (Boron+Aluminum) (B+Al) content/(µ g/kg) ≤ | 0.1 | |
| (Phosphorus+Arsenic) (P+As) content/(µ g/kg) ≤ | 0.3 | ||
| Gallium (Ga) content/(µ g/kg) ≤ | 0.1 | ||
| Antimony (Sb) content/(µ g/kg) ≤ | 0.1 | ||
| Indium (In) content/(µ g/kg) ≤ | 0.1 | ||
| Calcium (Ca) content/(µ g/kg) ≤ | 1 | ||
| Chromium (Cr) content/(µ g/kg) ≤ | 1 | ||
| Iron (Fe) content/(µ g/kg) ≤ | 5 | ||
| Potassium (K) content/(µ g/kg) ≤ | 1 | ||
| Sodium (Na) content/(µ g/kg) ≤ | 0.2 | ||
| Nickel (Ni) content/(µ g/kg) ≤ | 1 | ||
| Molybdenum (Mo) content/(µ g/kg) ≤ | 0.1 | ||
| Manganese (Mn) content/(µ g/kg) ≤ | 0.2 | ||
| Copper (Cu) content/(µ g/kg) ≤ | 0.2 | ||
| Cadmium (Cd) content/(µ g/kg) ≤ | 0.5 | ||
| Cobalt (Co) content/(µ g/kg) ≤ | 0.5 | ||
| Zinc (Zn) content/(µ g/kg) ≤ | 0.1 | ||
Online inquiry
-
Contacts
-
Company
-
Telephone
-
Email
-
WeChat
-
Verification Code
-
Message Content
-