HVA vacuum gate valve, vacuum plug valve 21200 series product features:
HVA vacuum gate valve, vacuum plug valve 21200 series product features:
1. Linear drive allows the use of welded bellows to seal the drive
2. The unique cylinder design minimizes impact and vibration
3. The HVA vacuum gate valve 21200 series does not have a mechanical lock inside the vacuum chamber, making it particularly suitable for semiconductor manufacturing and other sensitive processing industries that require low vibration
4. All moving joints have hard shafts that effectively reduce particle generation and make driving easier
5. HVA stainless steel valve body vacuum gate valve provides the smallest internal surface area in the vacuum valve industry
The valve body and all internal components are brazed together in a vacuum furnace at 1100 ℃ and 1x10E-6 Torr, ensuring the maximum integrity of the valve
7. In terms of maintenance, the bracket can be removed without removing the vacuum valve from the entire system
8. The valve can be driven manually or pneumatically
9. Standard or customized flanges meet different applications
10. The HVA standard cycle vacuum valve 21200 series can be installed at any position
11. Electromagnetic valve control with manual override
