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Fully automatic atomic force microscope AFM5500M
The AFM5500M is a fully automatic atomic force microscope with significantly improved operability and measurement accuracy, equipped with a 4-inch aut
Product details
Fully automatic atomic force microscope AFM5500M
The AFM5500M is a fully automatic atomic force microscope with significantly improved operability and measurement accuracy, equipped with a 4-inch automatic motor stage. The equipment provides a fully automatic operation platform for cantilever replacement, laser alignment, testing parameter settings, and other processes. The newly developed high-precision scanner and low-noise 3-axis sensor significantly improve measurement accuracy. Moreover, the SEM-AFM shared coordinate sample stage enables easy mutual observation and analysis within the same field of view.
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Production company: Hitachi High Tech
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characteristic
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parameter
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Application data
characteristic
1. Automation function
- Highly integrated automation functions pursue efficient detection
- Reduce human error in detection
4-inch automatic motor table
Automatic replacement of cantilever function
2. Reliability
Eliminate errors caused by mechanical reasons
- Large scale horizontal scanning
- Atomic force microscopy using a tube scanner typically obtains planar data through software calibration for the curved surfaces generated by the scanner's circular motion. However, using software correction methods cannot completely eliminate the influence of scanner arc motion, and distortion effects often occur in images.
The AFM5500M is equipped with the latest developed horizontal scanner, which can achieve accurate testing without being affected by circular motion.
Sample ：Amorphous silicon thin film on a silicon substrate
- High precision angle measurement
- The scanner used in ordinary atomic force microscopes undergoes crosstalk when vertically stretched and contracted. This is the direct cause of morphological errors in the horizontal direction of the image.
The new scanner installed in AFM5500M does not bend (crosstalk) in the vertical direction and can obtain correct images without distortion in the horizontal direction.
Sample : Textured-structure solar battery(having symmetrical structure due to its crystal orientation.)
- *When using AFM5100N (open-loop control)
3. Integration
Intimate fusion with other detection and analysis methods
Through the shared coordinate sample stage of SEM-AFM, it is possible to quickly observe and analyze the surface morphology, structure, composition, physical properties, etc. of the sample in the same field of view.
SEM-AFM Observation Example in the Same Field of View (Sample: Graphene/SiO)2）
The ovrlay images createed by using AZblend Ver.2.1, ASTRON Inc.
The above figure shows the application data of the shape image (AFM image) and potential image (KFM image) captured by AFM5500M, respectively, overlaid with SEM images.
- By analyzing AFM images, it can be determined that SEM contrast characterizes the thickness of graphene layers.
- The different layers of graphene result in a contrast in surface potential (work function).
- The contrast of SEM images is different, and the reason can be found through high-precision 3D morphology measurement and physical property analysis of SPM.
In the future, we plan to integrate with other microscopes and analytical instruments.
parameter
| Madatai | Automatic precision motor table Maximum observation range: 100 mm (4 inches) full field Motor table movement range: XY ± 50 mm, Z ≥ 21 mm Minimum step distance: XY 2 µ m, Z 0.04 µ m |
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| Maximum sample size | Diameter: 100 mm (4 inches), Thickness: 20 mm Sample weight: 2 kg |
| Scan range | 200 µ m x 200 µ m x 15 µ m (XY: closed-loop control/Z: sensor monitoring) |
| RMS noise level* | 0.04 nm or less (high-resolution mode) |
| Reset accuracy* | XY: ≤ 15 nm (standard spacing of 3 σ, measuring 10 μ m)/Z: ≤ 1 nm (standard depth of 3 σ, measuring 100 nm) |
| XY right angle | ±0.5° |
| BOW* | Below 2 nm/50 µ m |
| detection | Laser detection (low interference optical system) |
| optical microscope | Magnification: x1~x7 Field of view: 910 µ m x 650 µ m~130 µ m x 90 µ m Display magnification: x465~x3255 (27 inch monitor) |
| Shock absorber platform | Desktop active shock absorber platform 500 mm (W) x 600 mm (D) x 84 mm (H), approximately 28 kg |
| Soundproof cover | 750 mm(W) x 877 mm (D) x 1400 mm(H)、 About 237 kg |
| Size and weight | 400 mm（W） x 526 mm（D） x 550 mm（H）、 About 90 kg |
- *Parameters are related to device configuration and placement environment.
| OS | Windows7 |
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| RealTune ® II | Automatic adjustment of cantilever amplitude, contact force, scanning rate, and signal feedback |
| Operation screen | Operation navigation function, multi window display function (testing/analysis), 3D image overlay function, scanning range/measurement history display function, data batch analysis function, probe evaluation function |
| X. Y, Z scan driving voltage | 0～150 V |
| Real time testing (pixel points) | 4 screens (maximum 2048 x 2048) 2 screens (maximum 4096 x 4096) |
| Rectangular scan | 2: 1. 4:1, 8:1, 16:1, 32:1, 64:1, 128:1, 256:1, 512:1, 1024:1 |
| Analysis software | 3D display function, roughness analysis, cross-sectional analysis, average cross-sectional analysis |
| Automatic control function | Automatic replacement of cantilever and automatic laser alignment |
| Size and weight | 340 mm（W） x 503 mm（D） x 550 mm（H）、 About 34 kg |
| Power Supply | AC100~240 V ± 10% AC |
| Test mode | Standard configuration: AFM, DFM, PM (phase), FFM Optional: SIS morphology, SIS physical characteristics LM-FFM、VE-AFM、Adhesion、Current、Pico-Current、SSRM、PRM、KFM、EFM（AC）、EFM（DC）、MFM |
- *WINDOWS is a registered trademark of Microsoft Corporation in the United States and other countries outside the United States.
- *RealTune is a registered trademark of Hitachi, Ltd. in Japan, the United States, and Europe.
| Applicable Hitachi SEM models | SU8240, SU8230 (H36 mm type), SU8220 (H29 mm type) |
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| Sample table size | 41 mm（W） x 28 mm（D） x 16 mm （H） |
| Maximum sample size | Φ20 mm x 7 mm |
| Centering accuracy | ± 10 µ m (AFM centering accuracy) |
Movie
Application data
- SEM-SPM shared coordinate method for observing graphene/SiO2 in the same field of view2(PDF format, 750kBytes)
Application Data
Introduce the application data of scanning probe microscopy.
describe
Explain the principles and various states of scanning tunneling microscopy (STM) and atomic force microscopy (AFM).
History and SPM Development
Describe the history and development of our scanning probe microscope and our equipment. (Global site)
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