原子力显微镜 Ambient AFM MFM 产品优势：

可选扫描模式

• Scanning Tunneling Microscope (STM)

• Piezo Response Force Microscope (PrFM)

• Kelvin Probe Force Microscope (KPFM)

• Scanning Spreading Resistance Microscope (SSRM)

• Conductive AFM

• Capacitance Force Microscopy (CFM)

• Force Modulation Microscopy (FMM)

• AFM Spectroscopies

• Nanoindentation

• Nanolitography

Maximum Z Resolution

• <0.03nm with 100μmx100μm scanner

• <0.01nm with 40μmx40μm scanner

• <0.005nm with 4μmx4μm scanner

Static/Dynamic RMS Cantilever Z Noise

• <25fm √Hz noise floor with laser RF modulation

Scan Range

• 4x4x2 μm or 40x40x4 μm or 100x100x8 μm

STM Current Range

• 1pA-10nA, < 10fA / √Hz noise floor

Maximum Sample Size/Height

• 30x30x10 mm

Approach

• Software controlled

• Motorized

• <50 mm range with <250 nm sensivity

Camera

• CCD analog colour camera

Camera Resolution

• < 2 μm

Light Source for Optical Microscope

• White LED, adjustable from software

Signal Processing

• 16 bit ADCs / 24 bit DACs

• Digital feedback with FPGA / DSP

• Simultaneous scan of 16 channels

up to 4096x4096 pixels

Cantilevers

• All of the commercial cantilevers can be used

Acoustic and Vibration Isolation

• Multilayer acoustic enclosure 180°access

0.3Hz passive vibration isolation table