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Shanghai Baihe Instrument Technology Co., Ltd
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378 Series - Microscope for Semiconductor Testing
The optical system of the 378 series semiconductor inspection microscope FS-70 was developed for the popular FS60 model (later upgraded to FS70 model)
Product details

378 Series - Characteristics of FS-70 Semiconductor Testing Microscope
This optical system was originally developed for the popular FS60 model (later upgraded to FS70 model).
It is ideal as a microscope for measuring and detecting semiconductor devices.
FS70L supports three types of YAG laser waves (1064nm, 532nm, 355nm), and FS70L4 supports two wavelengths (532nm, 266nm), which can be used for laser cutting and thin film technology in semiconductor and liquid crystal substrates. This expands the scope of laser usage. However, Sanfeng Corporation is not responsible for the performance and safety of laser scanning in microscopes using Sanfeng measuring tools. We recommend careful inspection when selecting a laser emitter.
The standard functions of FS70Z include bright field of view, differential interference contrast (DIC), and polarization observation. FS70L and FS70L4 do not support DIC. 4. The use of built-in converters makes the operation of long working distance objectives very simple.
5. Easy to operate design: FS70 adopts a positive image optical system (the image in the field of view is in the same direction as the sample) and uses a rubber handle to enlarge and fine tune the handwheel.

378 series - Performance parameters of semiconductor testing microscope FS-70

model

FS-70

FS70-TH

FS70Z

FS70Z-TH

FS70L

FS70L-TH

FS70L4

JS70L4-TH

Item number

378-184-1

378-184-3

378-185-1

378-185-3

378-186-1

378-186-3

378-187-1

378-187-3

Short base model

FS70-S

FS70-THS

FS70Z-S

FS70Z-THS

FS70L-S

FS70L-THS

FS70L4-S

FS70L4-THS

Item number

378-184-2

378-184-4

378-185-2

378-185-4

378-186-2

378-186-4

378-187-2

378-187-4

FOCUS

50mm stroke, concentric focal length coarse adjustment (3.8mm/rev) and fine adjustment (0.1mm/rev) handwheel (left, right 0)

image

just as

pupillary distance

Siedentopf type, adjustable range

field number

24

angle of depression

0 ° to 20 °

0 ° to 20 °

0 ° to 20 °

0 ° to 20 °

Transmittance

50/50

100/0 or 0/100

50/50

100/0 or 0/100

100/0 or 0/100

100/0 or 0/100

100/0 or 0/100

100/0 or 0/100

Tube lens

Built in laser beam filter

Suitable for laser applications

2×zoom

Suitable for laser applications

1064/532/355mm

532/355mm

Camera port

C-mount (using adapter B option)

Use laser chips with TV ports

C-mount socket (with green filter conversion switch)

Lighting system, optional

Bright field reflective lighting (Kohler lighting, with aperture) 12V 100W fiber optic, infinite brightness adjustment, light guide length: 1.5m, power consumption 150W

Objective lens, optional

M Plan Apo,M Plan Apo SL, G Plan Apo

Objective lens, optional

M/LCD Plan NIR

M/L CD Plan NUV

M Plan UV

M Plan UV

load

14.5kg

13.6kg

14.1kg

13.2kg

14.5kg

13.6kg

14.1kg

13.2kg

Weight (host)

6.1kg

7.1kg

6.6kg

7.5kg

6.1kg

7.1kg

6.6kg

7.5kg


378 series - Technical parameters of semiconductor testing microscope FS-70
FOCUS
Method: There are concentric rough and fine adjustment handwheels (left and right)
Range: 50mm measurement range, fine adjustment of 0.1mm/rev concentric coarse adjustment of 3.8mm/rev
Trinocular tube image: positive image
Pupil distance: Siedentopf type
Adjustment range: 51-76mm
Number of fields of view: 24
Prone angle: 0 ° -20 ° (only used for - TH, THS models)
Lighting system: bright field of view reflective lighting (Kohler lighting, with aperture)
Light source: 12V100W fiber optic, infinite brightness adjustment), light guide length 1.5m, power consumption 150W
Objective lens (optional): M Plan Apo, M Plan Apo SL, G Plan Apo

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